Publication: Analysis of pump-down behavior of a vacuum chamber by altering venting features
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Date
2023-07-07
Authors
Chai, Yen Bin
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Abstract
This study aimed to investigate the pump-down and vacuum decay behaviors of a test flange with and without a venting groove, as well as to examine the pathways inside the O-ring groove after the O-ring is fully compressed. The research utilized an experimental approach to analyze the pump-down and vacuum decay behaviors of the test flange, while a simulation approach was employed to study the pathways within the O-ring groove. The results of the study revealed a significant correlation between the increased surface metal area and the lower reachable vacuum level and increased in outgassing from metal surface. Additionally, incorporating a venting groove is essential to enhance the stability of the vacuum system by preventing virtual leaks during the pump-down process. Furthermore, the absence of a venting groove in the test flange poses a risk of virtual leaks. Regarding the investigation of pathways inside the O-ring groove after full compression, finite element analysis (FEA) simulation models were employed. The study successfully identified the remaining pathways after O-ring compression through FEA simulation results. These findings highlight the critical role of the venting groove in achieving optimal performance in vacuum systems, particularly in industries such as manufacturing where the elimination of particles is crucial. Besides, these findings indicate that importance of the FEA simulation result as a fundamental information to carry out CFD simulation in future study. In conclusion, this research sheds light on the pump-down behavior and vacuum decay of a test flange with and without venting grooves. It emphasizes the importance of incorporating venting grooves and considering the impact of metal surface to vacuum level performance.