Synthesis And Characterization Of CuS By Laser-Assisted Spray Pyrolysis Deposition For pH Sensor Application
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Date
2017-11
Authors
Alzuayre, Fayroz Arif Sabah
Journal Title
Journal ISSN
Volume Title
Publisher
Universiti Sains Malaysia
Abstract
This study involves the novel application of copper sulphide (CuS) films as pH sensors. The synthesized CuS thin films were used as extended gate field effect transistor (EGFET), which was then applied as a pH sensor. The pH sensitivity, hysteresis, repeatability, stability and reliability of the CuS thin films were measured. The effects of thin film material, temperature, illumination, pH sensor thickness, sensor conductivity, sensor surface structure, precursor solvent type on crystal orientation and Metal oxide semiconductor field effect transistor (MOSFET) were studied. The CuS thin films were synthesized on several substrates using spray pyrolysis and laser-assisted spray deposition at substrate temperature of 200°C.
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Keywords
Synthesis And Characterization Of CuS , Laser-Assisted Spray Pyrolysis Deposition For ph Sensor