Design and fabrication of a projectionlithography machine for the application of microfluidic pattern using commercially available uv led
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Date
2018-05
Authors
Zikri Zulkifli
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Abstract
In the present work, a 12µm PDMS microfluidic channel are developed using an in house designed projection lithography machine system. A master pattern was first produce by
patterning on microscope slide which is spin coated with SU-8 2002 negative photoresist and
exposing it with the in-house projection lithography machine. Using commercially available
low power ultraviolet light emitting diode (UVLED) as a medium to expose the photoresist at
different height with quartz glass and soda lime glass. A flexible replication of the master mold
was produced using heat cured poly-dimethyl-siloxane (PDMS) via cast molding process
which can be used repeatedly to fabricate more PDMS microfluidic channel. The scanning
electron microscopy measurement of the fabricated microfluidic pattern on the PDMS showed
promising result with a good pattern quality and resolution using the commercially available
low power UVLED. This work has demonstrated that the projetion lithography machine system
using commercially available low power UVLED is a promising technique and tool for
fabricating microfluidic structure on flexible substrate for future application.