Fabrication Of Cw Co2 Laser For Indium Tin Oxide Annealing Study
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Date
2015-05
Authors
ABED, FORAT HAMZAH
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Abstract
The objectives of this study are to design; construction and operation of the
continuous wave CO2 laser system and its characterisation the effecting parameters
pressure, current, and temperature on laser output power are discussed. The CW CO2
laser system parameters were (10 kV) voltage, current (18 mA) and (6 mbar)
pressure of the gaseous mixture. It has a mix of gases of (CO2, N2, He) in a ratio of
(10 %, 10 %, and 80 %), respectively. The cooling water temperature was (5 ). It
was found that these parameters are the optimum to get the highest value for the CW
CO2 laser system, which reached (54 watts), and the efficiency of this CW CO2 laser
system reached (30 %). CW CO2 lasers, among the most efficient and powerful of all
lasers, have many applications in industrial and medical fields. The properties of
indium tin oxide (ITO) thin films strongly depend on the temperature preparation
condition, so we suggest using a CW CO2 laser beam for indium tin oxide (ITO) thin
film annealing and study the effects on the structural, optical and electrical properties
of thin film. ITO thin films are deposited on glass substrates by sputter coater system
(RF) from a high density target (In2O3- SnO2, 90- 10 wt %). The base pressure of the
chamber was 10−7 mbar. The ITO thin films have been prepared at power values 100
W. After deposition, ITO thin films have been irradiated by CW CO2 laser (λ= 10.6
μm). These films were annealed at different temperatures 250 , 350 and 450
using laser power 13 W, 19 W and 25 W respectively in the air for 20 minutes.
On the other hand, study the effects of annealing using the conventional
method (heat furnace) on the structural, optical and electrical properties of ITO thin
film at different temperatures 250 , 350 , 450 and 550 . It was done for 1
hour in the air, and then comparison of annealing between a CW CO2 laser and the
heat furnace using different ITO thicknesses of 200 nm and 400 nm. It was found
that the annealing technique using the CW CO2 laser is superior to using the heat
furnace. It was found that the highest average optical transmission was 90.1 98.2
(%) and the energy gap was 3.81 eV at thickness 200 nm using CW CO2 laser, and
the highest grain size was 43.94 nm, the roughness was 4.92 nm, the lower resistivity
was 2.9x10-4 Ω.cm and the lower sheet resistance was 7.3 Ω/sq at thickness 400 nm
using CW CO2 laser.
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Keywords
Fabrication Of Cw Co2 Laser , For Indium Tin Oxide Annealing Study