Publication: Modelling and simulation of microaccelerometer using mems software
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Date
2009-04-01
Authors
Mohd Raffay, Mohd Razemy
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Abstract
The objective of this project is to design and simulate an accelerometer by using MEMS software. Accelerometer is an inertial sensor that measures the acceleration or deceleration of a moving object. In this project, a capacitive comb drive accelerometer is designed by using CoventorWare. CoventorWare
supports both system-level and physical design approaches. A schematic model of the accelerometer is developed. The dimensions of the accelerometer
are defined as global variables. The schematic are simulated under various conditions by using Architect’s performance analyses. Plotting tools are used to
view and measure results in several graphical formats. After refining and finalizing a design, the design is then transferred to 2-D layout using Layout
Editor. For verification, a 3-D model was built. In this report, the results obtained from the analysis are compared with the formula to ensure the analysis
obtained is correct. The accelerometer is at its best performance when it operates at 5g acceleration. Thus, the accelerometer can be used in hard disk
to detect sudden fall. The hard disk will be turned off automatically when the accelerometer detect sudden fall. Hence, the data in the hard disk can be saved
from loss when the hard disk falls down.