Publication: Modelling and simulation of rf mems switch
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Date
2010-04-01
Authors
Hamzah, Mohd Izahamuddin
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Abstract
A radio-frequency micro-electro-mechanical systems (RF MEMS) switch with bistable states based on electromagnetic actuation is presented. The switch has two stable positions due to the adoption of the permanent magnet, which will lead to a lower power consumption of the device. With electromagnetic actuation arising from the planar coils, the cantilever beam can switch from one stable position to the other. The design of the switch is simulated by coventorware software. A current pulse with amplitude of 50 mA is needed for the fabricated switches switching between two stable states that is in good agreement with simulation and the switching time is only approximately 20μs. The insertion loss is -0.11dB and the isolation are -43dB at 3 GHz. 3GHz is frequency for Radio frequency. Basically radio frequency is within 3 kHz to 300 GHz. 3GHz is the maximum frequency for the micro size of RF MEMS switch device.