Publication: Design, modeling and simulation of decoupled mems gyroscope
Date
2008-04-01
Authors
Ng, Kiah Siong
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Abstract
With the high demand on commercial and military navigation, guidance, game console, satellite altitude sensing and automotive control system, efforts have been made to make a high performance of MEMS gyroscope. This study is to design a MEMS gyroscope which is structurally symmetry and fully decoupling between the drive and sense mode oscillations. The design is based on vibratory type gyroscope. The design considerations include the flexure suspension design, structural design and the synchronous demodulation technique. Analytical results have been obtained by the theory behind the gyroscope principles. Ansys 9.0 was used to simulate the design and the simulations involve modal analysis, static displacement analysis and harmonic analysis. The analytical results are then compared to the simulation results and to the reference design named elastically gimbaled gyroscope (EGG). The simulation results show good agreement to the analytical result. The proposed design shows significant improvement over the EGG design, which is done by other.