Fast steady-state and transient analyses of mems devices
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Date
2010-06
Authors
Loh, Jit Seng
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Abstract
Fmiie element simulation plays a crucial role in development of MEMS
(MicroElectroMechanical Systems) devices by providing accurate upfront
characterization of its multi-physics behaviour, but it also requires substantial amount
of computational time. To address this deficit, the concept of using beam model is
specifically introduced in this thesis to achieve efficient and accurate steady-state finite
element simulation of electro-thermal micro-actuators. Beam model can achieves high
computational efficiency by reducing the total degrees of freedoms involved to only
those necessary for sufficiently accurate estimate of the bulk mechanical behaviour,
while accounting for material non-linearity to ensure solution accuracy. Good
correlation is obtained when compared to using three-dimensional finite element model,
where the deviation is less than 4% but with more than one order of computational time
reduction in all five case studies. Based on this beam model, parametric studies are
also efficiently conducted to investigate the effects of geometrical dimensi.ons on the
output efficiency of various electro-thermal micro-actuators. In addition, Asymptotic
Waveform Evaluation (AWE) method is also introduced in this thesis to efficiently and
accurately solve linear dynamics finite element simulation of any MEMS devices in
general. Based on the concept of approximating the original three-dimensional finite
element model with a reduced order model, AWE method can provide equivalent
accuracy as conventional numerical time integration method, but at significantly less
amount of computational time. In this thesis, AWE method has been successfully
applied to build reduced-order models for a micro-actuator, micro-hotplate and also
micro-accelerometer, and it is shown that the achieved computational time reduction is
at least one order with less than 4% deviation when compared to ANSYS® solution.
Besides that, it is demonstrated that AWE is capable of handling various complex
boundary conditions, enabling it to solve various practical engineering problems.
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Keywords
The concept of using beam model is specifically introduced , to achieve accurate steady-state finite element simulation of electro-thermal micro-actuators.