Publication: Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
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Date
2022-09
Authors
Nabihah Binti Kasim
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Abstract
This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the film.
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Keywords
Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film , Silicon Substrate